Preloading Piezoelectric Stack Actuators in High-Speed Nanopositioning Systems
نویسندگان
چکیده
منابع مشابه
Preloading Piezoelectric Stack Actuators in High-Speed Nanopositioning Systems
Recent development in high-speed nanotechnology applications, such as scanning probe microscopy and nanofabrication, has increased interest on the advancement of high-bandwidth flexure-guided nanopositioning systems. These systems are capable of providing motions with sub-nanometer resolution over a positioning bandwidth of a few kilohertz or more. High-speed nanopositioning devices are commonl...
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Piezoelectric force and position sensors provide high sensitivity but are limited at low frequencies due to their high-pass response which complicates the direct application of integral control. To overcome this issue, an additional sensor or low-frequency correction method is typically employed. However, these approaches introduce an additional first-order response that must be higher than the...
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Nanometer-precise positioning at ultra-high velocities is a major challenge for rapidly emerging applications that use scanning probes in order to observe and alter the properties of materials down to the nanoscale. Typical examples include surface imaging, nanolithography and data storage. For example in probe-based data storage, constant linear velocity along the scan trajectory is required, ...
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Due to their high stiffness, small dimensions and low mass, piezoelectric stack actuators are capable of developing large displacements with bandwidths of greater than 100 kHz. However, due to their large electrical capacitance, the associated driving amplifier is usually limited in bandwidth to a few kHz. In this paper the limiting characteristics of piezoelectric drives are identified as the ...
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ژورنال
عنوان ژورنال: Frontiers in Mechanical Engineering
سال: 2016
ISSN: 2297-3079
DOI: 10.3389/fmech.2016.00008